Crystal Grade High Purity Hafnium Sputtering Target
Hafnium (Hf) is a lustrous, silver grey metal. Hafnium-based thin films are used as an insulator in the newer generations of semiconductors. The thin film prevents copper diffusion into silicon. Amorphous hafnium oxide has a high dielectric constant, it allows education of the gate leakage current and improves performance of the electronics. – Hafnium is found in zirconium minerals; it is difficult to separate these 2 elements due to their chemical resemblance. Our hafnium sputtering target is made from refined crystal bar which ensures low zirconium content, high purity and high reliability.
Product Details
| Material | Hafnium |
|---|---|
| Purity | 4N (99.99%) pure |
| Elements | Aluminum (Al) |
| Maximum Diameter | 17.5 in |
| Maximum Length | 55 in |
| Maximum Width | 16 in |
| Grain Size | 28 µm |
| Concentration of Element Lithium (Li) | <0.005 ppm |
| Concentration of Element Beryllium (Be) | <0.001 ppm |
| Concentration of Element Boron (B) | 0.002 ppm |
| Concentration of Element Fluorine (F) | <0.05 ppm |
| Concentration of Element Sodium (Na) | 0.02 ppm |
| Concentration of Element Magnesium (Mg) | <0.01 ppm |
| Concentration of Element Aluminum (Al) | 0.13 ppm |
| Concentration of Element Silicon (Si) | 0.38 ppm |
| Concentration of Element Phosphorus (P) | <0.005 ppm |
| Concentration of Element Sulfur (S) | 0.08 ppm |
| Concentration of Element Chlorine (Cl) | <0.05 ppm |
| Concentration of Element Potassium (K) | <0.01 ppm |
| Concentration of Element Calcium (Ca) | <0.01 ppm |
| Concentration of Element Scandium (Sc) | <0.5 ppm |
| Concentration of Element Titanium (Ti) | 0.07 ppm |
| Concentration of Element Vanadium (V) | <0.005 ppm |
| Concentration of Element Chromium (Cr) | 0.16 ppm |
| Concentration of Element Manganese (Mn) | <0.005 ppm |
| Concentration of Element Iron (Fe) | 3.7 ppm |
| Concentration of Element Cobalt (Co) | 0.03 ppm |
| Concentration of Element Nickel (Ni) | 0.77 ppm |
| Concentration of Element Copper (Cu) | 0.06 ppm |
| Concentration of Element Zinc (Zn) | <0.01 ppm |
| Concentration of Element Gallium (Ga) | <0.01 ppm |
| Concentration of Element Germanium (Ge) | <0.01 ppm |
| Concentration of Element Arsenic (As) | <0.005 ppm |
| Concentration of Element Selenium (Se) | <0.05 ppm |
| Concentration of Element Bromine (Br) | <0.05 ppm |
| Concentration of Element Rubidium (Rb) | <0.005 ppm |
| Concentration of Element Strontium (Sr) | <0.05 ppm |
| Concentration of Element Yttrium (Y) | <0.05 ppm |
| Concentration of Element Zirconium (Zr) | ~0.54 wt ppm |
| Concentration of Element Niobium (Nb) | 0.07 ppm |
| Concentration of Element Molybdenum (Mo) | 0.2 ppm |
| Concentration of Element Ruthenium (Ru) | <0.005 ppm |
| Concentration of Element Rhodium (Rh) | <0.01 ppm |
| Concentration of Element Palladium (Pd) | <0.05 ppm |
| Concentration of Element Silver (Ag) | <0.005 ppm |
| Concentration of Element Cadmium (Cd) | <0.05 ppm |
| Concentration of Element Indium (In) | <0.005 ppm |
| Concentration of Element Tin (Sn) | <0.05 ppm |
| Concentration of Element Antimony (Sb) | <0.05 ppm |
| Concentration of Element Tellurium (Te) | <0.05 ppm |
| Concentration of Element Iodine (I) | <0.01 ppm |
| Concentration of Element Cesium (Cs) | <0.001 ppm |
| Concentration of Element Barium (Ba) | <0.005 ppm |
| Concentration of Element Lanthanum (La) | <0.005 ppm |
| Concentration of Element Cerium (Ce) | <0.005 ppm |
| Concentration of Element Praseodymium (Pr) | <0.005 ppm |
| Concentration of Element Neodymium (Nd) | <0.005 ppm |
| Concentration of Element Samarium (Sm) | <0.005 ppm |
| Concentration of Element Europium (Eu) | <0.005 ppm |
| Concentration of Element Gadolinium (Gd) | <0.005 ppm |
| Concentration of Element Terbium (Tb) | <0.005 ppm |
| Concentration of Element Dysprosium (Dy) | <0.005 ppm |
| Concentration of Element Holmium (Ho) | <0.005 ppm |
| Concentration of Element Erbium (Er) | <0.005 ppm |
| Concentration of Element Thulium (Tm) | <0.005 ppm |
| Concentration of Element Ytterbium (Yb) | <0.005 ppm |
| Concentration of Element Lutetium (Lu) | <0.005 ppm |
| Concentration of Element Hafnium (Hf) | Matrix ppm |
| Concentration of Element Tantalum (Ta) | 5 ppm |
| Concentration of Element Tungsten (W) | 0.25 ppm |
| Concentration of Element Rhenium (Re) | <0.01 ppm |
| Concentration of Element Osmium (Os) | <0.05 ppm |
| Concentration of Element Iridium (Ir) | <0.1 ppm |
| Concentration of Element Platinum (Pt) | <0.1 ppm |
| Concentration of Element Gold (Au) | <0.05 ppm |
| Concentration of Element Mercury (Hg) | <0.05 ppm |
| Concentration of Element Thallium (Tl) | <0.01 ppm |
| Concentration of Element Lead (Pb) | <0.01 ppm |
| Concentration of Element Bismuth (Bi) | <0.01 ppm |
| Concentration of Element Thorium (Th) | 0.007 ppm |
| Concentration of Element Uranium (U) | <0.001 ppm |